TITLE 40 - PROTECTION OF ENVIRONMENT

CHAPTER I - ENVIRONMENTAL PROTECTION AGENCY

PART 63 - NATIONAL EMISSION STANDARDS FOR HAZARDOUS AIR POLLUTANTS FOR SOURCE CATEGORIES

subpart bbbbb - NATIONAL EMISSION STANDARDS FOR HAZARDOUS AIR POLLUTANTS FOR SEMICONDUCTOR MANUFACTURING

63.7191 - What records must I keep?

  (a) You must keep the records listed in paragraphs (a)(1) through (3) of this section.

  (1) A copy of each notification and report that you submitted to comply with this subpart, including all documentation supporting any Notification of Compliance Status and periodic report of compliance that you submitted, according to the requirements in 63.10(b)(2)(xiv).

  (2) The records in 63.6(e)(3)(iii) through (v) related to startup, shutdown, and malfunctions.

  (3) Records of performance tests and performance evaluations as required in 63.10(b)(2)(viii).

  (b) For each CMS, you must keep the records listed in paragraphs (b)(1) through (5) of this section.

  (1) Records described in 63.10(b)(2)(vi) through (xi).

  (2) All required measurements needed to demonstrate compliance with a relevant standard (e.g., 30-minute averages of CMS data, raw performance testing measurements, raw performance evaluation measurements).

  (3) All required CMS measurements (including monitoring data recorded during unavoidable CMS breakdowns and out-of-control periods).

  (4) Records of the date and time that each deviation started and stopped, and whether the deviation occurred during a period of startup, shutdown, or malfunction or during another period.

  (5) Records for process vents according to the requirements specified in 63.982(a)(2) and storage tank vents according to the requirements specified in 63.982(a)(1).